PS4L 配置向导
Configuration for PS4L
A. 基础系统
手动 / 半自动系统可选
手动
半自动
B. 载片台
同轴 / 三轴 / RF 载片台可选
同轴载片台
6 Inch
PN: A-CKS-RG-2010
150 mm 6" 镀镍， 真空铝制载片台
8 Inch
PN: A-CKS-RG-2016
200 mm (8") 镀镍，真空铝制载片台特别适用于晶圆局部，单个芯片的探针测试晶圆尺寸可达 8".
三同轴载片台
6 Inch
PN: A-CKS-RG-2012
6" (150 mm) Round Triaxial Chuck - A low capacitance triaxial design allows sensitive measurements to be taken on standard probe systems.
Mechanical properties:
材质: 铝制，高隔离的teflon 基底，表面镀镍，
teflon base
平整度: 0.0008"以内
平行度: 0.001"以内
Electrical properties:
漏电流: < 50 fA@ 100VDC
电容: < 50 pF (@ 30VDC (顶面到保护端/接地端)
8 Inch
PN: A-CKS-RG-2017
200 mm triaxial chuck with ceramic add-on layers, vacuum holes and gold plating
8" Round ISO Chuck - Triaxial A low capacitance triaxial design allows sensitive measurement to be taken on stardard probe systems.
Mechanical properties
Material: Gold plated copper with nickel base coat built on an ULTEM
1000 base
平整度: 0.0008"以内
平行度: 0.001"以内
Electrical properties:
Current leakage: < 50 fA@ 100V DC
Capacitance: < 10 pF with driven guard (top to guard/ground)
Designed to lower capacitance, reduce weight and upgrade probing
system with state of
the art high performance thermal plastic design. The chuck is hard Gold plated to reduce contact resistance.
高频载片台
6 Inch :
PN:A-CKM-HG-2210
50mm HF chuck, nickle plating, vacuum holes and auxiliary chucks (2) with independent vacuum control, Includes two calibration holders.
(Requires V acuum Manifold A-ACC-21014.)
8 Inch :
PN:A-CKM-HG-2220
200 mm HF chuck, nickle plating, vacuum holes and auxiliary
chucks (2) with independent vacuum control
200 mm (8") HF/Microwave nickel plated chuck with vacuum holes
that are ideally suited for delicate substrates. Includes two calibration
holders.
(Requires V acuum Manifold A-ACC-21014.)
C. 高低温系统
*有下列温控系统可选
ATT 高低温系统 (德国造)
Air Cooled - 60C ~ 200C
6 Inch :
PN: A-CKT-RN-3031
8 Inch :
PN:A-CKT-RN-3032
ATT Hot Chuck System C150/200-60
A complete 150/200 mm thermal chuck system with -60o C to +200o C
capability that includes a C200 chuck, a C200 controller and a C60
air cooling unit
Low noise, high performance, exceptional temperature uniformity
Low noise coaxial chuck with a triaxial connector. Field upgradeable
to an ultra low noise triaxial chuck with a triax add-on surface.
Temperature Range: -60o C to +200o
Temperature Stability: +/- 0.1o C
Temperature Accuracy: +/- 0.5o C
Heating Rate: +25oC to +200oC < 8 min, -60o C to +25o C < 4 min
Cooling Rate: +25o C to -60o C < 8 min, +200o C to +25oC < 6 min
Temperature Uniformity: -60oC to +200oC <+/- 0.5k/0.5%
Flatness/Parallelism: -60oC to +200oC <+/- 5.0 um
Isolation: > 2 TOhm @ 25oC
Capacitance: 800 pF - standard, 200 pF - triax
Maximum Voltage: 500 V at chuck top
Interface: RS232 - standard, IEE488 - optional
Chuck Dimensions: Diameter - 205 mm, Height - 28 mm, Weight - 4250 g
Plating: Nickel - standard, Gold - optional
Controller Dimensions: 25 cm (250 mm) x 48 cm (480 mm) x 12 cm
ATT 高低温系统 (德国造)
6 Inch :
PN: A-CKT-RN-3000 Air Cooled +25C~ 300C
PN: A-CKT-RN-3001 Air Cooled +25C~ 200C
8 Inch :
PN:A-CKT-RN-3002 Air Cooled +25C~ 300C
Temptronics 高低温系统
Liquid Cooling -60 ~ 200 C
6 Inch:
PN: A-CKT-RG-21xx
8 Inch
PN:A-CKT-RG-2135
TPO 3000 Thermal Chuck System with Controller for -65 degree C low temperature capacity and extended 200 degree C range, RS232 and IEEE-488 communication , 220 Volt. Includes programmable cycle/ramp/soak, heat exchanger module, touch screen temperature
control, stand alone self contained cooler circulator and cabinets. Includes 8 inch (200 mm) chuck with -65 degree C to +200 degree C range.
May also be used with 4, (100 mm) 5 (125 mm) , and 6 (150 mm) and individual die.
D.显微镜桥架构 / 移动
选择移动范围和桥尺寸
显微镜桥 +手调 显微镜移动
50x50mm Manual :
PN:A-CM-KIT-0001
A compound microscope bridge, movement and adapter kit
-Kit includes a large microscope bridge, a compound microscope
movement with 50 mm of X & Y movement and 50 mm of pneumatic
Z movement and a compound microscope adapter.
- Optics ordered separately
200x200mm Manual:
PN: A-SMT-XX-4600 + A-LMT-XX-4053
Manual Large Area Manual Microscope Movement
Travel: 200 mm in X & Y and 80 mm in Z.
Z lift is pneumatic and vertical.
Additional manual Z lift is provided by the focus block
显微镜桥 + 马达驱动 显微镜移动
50mm XY (200mm Optional)
PN:A-SMT-XX-4600 + A-SMT-XX-4053
Programmable Microscope Movement with 50 mm X, Y and Z travel. Controls thru PILOT software PC control. Cross roller bearings, linear optical scales and rigid design to accommodate large loads. L x W 160 mm x 160 mm x 160 mm. For All
SemiProbe Stations.
Requires Control electronics Programmable
Microscope Specifications:
Positioning Accuracy: +/- 2.5 um
Repeatability: +/- 1 um
Resolution: 0.5 um
E.LEC / 顶盖
局部环境室
Localized environmental chamber (LEC) to provide light, EMI and temperature protection. LEC with top hat required to prevent the wafer chuck and device under test ( DUT) from frosting during chuck operations below the dew point. Requires supply of dry air or dry nitrogen. The LEC alone is suitable for temperature ranges down to
-40*C. An LEC and top hat will provide frost free probing to -65*C.
Top Hat
A-CKS-XX-2029
Top Hat structure for LEC to provide light, electrical and humidity shielding for up to 8 probes (HF or DC) entering the LEC chamber
F.显微镜
从以下三种显微镜选择
Azoom Micro (Manual Station)
A-Zoom Micro Scope high power, 10x Eyepieces
**Objective not included. (P/N: 5x obj recommended for 70x-700x zoom)
Azoom 2 (Semi-Auto)
A-ZM 10X, MANUAL ZM, EYEPIECES
10X A-Zoom2 - Video with Eyepieces, Manual Focus Block, Manual Zoom Control, Proportionate Control
Motic (Laser Ready)
VGA Scope Camera
可调分辨率, 4:3 或者 16:10 输出
1280*1024
1024*768
1680*1050
USB Scope Camera
Objectives
G. Laser Cutting System
Integration with Semiprobe Probestation
EZLAZE III 1000-3018
MODEL,EZLAZE III
With the following configuration
Wavelength 532 nm - Green
Power Option 220v
Mount Option V-Mount Non GRN/UV4
Mount Option Features Camera Adapter
V-Mount Umbilical 2.4M Umbilical Base
Energy Option Std Energy, Green 0.6mJ
Label Kit Class 3B Ezlaze Label Kit
Spot Marker Ext.W/Light maker
Spot Marker Cable Length Standard 2.4m cable
Shutter Options XY Std. Res. w/o rotation
H. Manipulator
Choose Manipulator below
直流操纵杆
A-MAN-MA-8005-Coax
A complete MA 8005 small footprint manipulator for use with large
structures or in combination with others mounted on a probe ring to
create a configurable probe card.The complete MA-8005 manipulator
includes the adjustable probe arm face plate, the coaxial probe arm
with clamping probe tip collet and magnetic base with on/off switch.
Travel Range of motion in:
X: 8 mm
Y: 8 mm
Z: 8 mm
TPI: 50 TPI
A-MAN-MA-8005-M-T (Triax)
A complete MA-8005 small footprint manipulator for use with
large structures or in combination with others mounted on a
probe ring to create a configurable probe card. The complete
MA-8005 manipulator includes the adjustable probe arm face
plate, the triaxial probe arm with clamping probe tip collet and
magnetic base with on/off switch.
Travel Range of motion in:
X: 8 mm
Y: 8 mm
Z: 8 mm
TPI: 50 TPI
直流操纵杆
A-MAN-MA-8000-100-M-C
Complete MA-8000 Manipulator with switchable magnetic base and coaxial probe arm with adjustable faceplate. This manipulator is intended for precise probing and instrumentation for industrial,
medical, biological, semiconductor, and general scientific
applications. It provides 3-axis motion (X,Y & Z) with .500"
movement on each axis. Motion is controlled by three 100 TPI in-line adjustment screws. Precision high-quality 440 stainless steel ball bearings allow precise linear motion on all three axis. Gibs and Slides are made of heat treated 440 stainless steel with ground finish.
Specifications:
Height: 4.00" Nominal
Travel: X, Y, Z axis = .500"
Dimensions: (H,W,L) (3.25" x 2.00" x 2.50")
Resolution: 100 TPI (40 TPI, and 80 TPI are also available)
Rear thumbscrew controls for X & Y movement which eliminates
requirements for dedicated right or left hand manipulators. The
operator can place the manipulators on any side of the platen.
A-MAN-MA-8000-100-M-T
Complete MA-8000 Manipulator with switchable magnetic base and
triaxial probe arm with adjustable faceplate. This manipulator is
intended for precise probing and instrumentation for industrial,
medical, biological, semiconductor, and general scientific
applications. It provides 3-axis motion (X,Y & Z) with .500"
movement on each axis. Motion is controlled by three 100 TPI in-line
adjustment screws. Precision high-quality 440 stainless steel ball
bearings allow precise linear motion on all three axis. Gibs and
Slides are made of heat treated 440 stainless steel with ground
finish.
Specifications:
Height: 4.00" Nominal
Travel: X, Y, Z axis = .500"
Dimensions: (H,W,L) (3.25" x 2.00" x 2.50")
Resolution: 100 TPI
Rear thumbscrew controls for X & Y movement which eliminates
requirements for dedicated right or left hand manipulators. The
operator can place the manipulators on any side of the platen.
高频应用操纵杆
A-MAN-MA-8100-MHFNS
The MA-8100 is a complete high precision manipulator for submicron and high stability DC & HF applications
Configuration includes the manipulator, a high frequency probe arm and a magnetic base.
HF probe arm is North/South configuration and is planarizable.
Straight Line Accuracy - Runout of 0.0001 inch per inch of travel.
Travel - 10 mm of travel in X & Y & Z.
100 TPI micrometer drive
Cross Roller Bearing monolithic construction for smooth and
accurate movement
Factory adjusted preload offers friction free running.
Thumb wheel style micrometers for delicate movement
*HF Probes & HF Cabling NOT Included
A-MAN-MA-8100-MHFWE
The MA-8100 is a complete high precision manipulator for submicron and high stability DC & HF applications
Configuration includes the manipulator, a high frequency probe arm and a magnetic base.
HF probe arm is West/East configuration and is planarizable.
Straight Line Accuracy - Runout of 0.0001 inch per inch of travel.
Travel - 10 mm of travel in X & Y & Z.
100 TPI micrometer drive
Cross Roller Bearing monolithic construction for smooth and
accurate movement
Factory adjusted preload offers friction free running.
Thumb wheel style micrometers for delicate movement
*HF Probes & HF Cabling NOT Included
RF Manipulator (High Precision)
A-MAN-MA-8500-MB-HF-EW/NS
The MA-8500 is a complete high precision manual manipulator for HF/Microwave probing applications.
- The complete configuration consists of the MA-8500 manipulator, a magnetic base and a HF probe arm
- It is a heavy duty, low profile manipulator with linear crossed-roller guides
- Designed to accommodate standard HF arms or mounting plates for instrumentation, extension modules and tuners
- Load capacity is 22 pounds (10 kg)
- Travel Range (X,Y) - 25 mm, (Z) - 10 mm
- Standard actuator drive is via micrometers. Differential (coarse and fine) and programmable drives are available.
- Designed to fit on PS4L standard and mmW platens
- Up to eight (8) manipulators ( four (4) MA-8500 and four (4) DC manipulators) can simultaneously be placed on the platen
I. DC Probe Holder
And a great subtitle too
DC Probe Holder
DC Probe Holder
Kelvin and Quasi-kelvin probe
J. DC Probe Tips
And a great subtitle too
DC Straight Tips
1um PN: 17584
2um PN: 17583
3um PN: 17585
5um PN: 17586
7um PN: 17680
DC Triax Tips
0.5 um PN: 107-159
1 um PN: 107-157
5 um PN: 107-158
10 um PN: 107-160
K. RF Probe
And a great subtitle too
RF Probe ECP - Gold Pad
ECP18-xx-yy-DP
ECP40-xx-yy-DP
ECP50-xx-yy-DP
xx: GS, SG, GSG
yy: 100,150,200,250,300,350....
RF Probe ECP High Power
ECP18-xx-yy-DP-HC
ECP40-xx-yy-DP-HC
ECP50-xx-yy-DP-HC
xx: GS, SG, GSG
yy: 100,150,200,250,300,350....
RF Probe 40A Series - Al Pad
40A-xx-yy
50A-xx-yy
67A-xx-yy
xx: GS, SG, GSG
yy: 100,150,200,250,300,350....
L. Cables & Adapters
And a great subtitle too
DC Cable
Coax Cable BNC - 24 inch
PN: A-CAC-XX-17008
Triax Cable - 36 inch
PN: A-CAC-XX-17011
RF Cable
40GHz PN: GC2.92 MF-48
50GHz PN: GC2.4MF-48
67GHz PN: GC1.85MF-48
Adapters
RF Adapters:
DC - 67GHz: 1.85mm M /F
DC - 50GHz: 2.4mm M/F
DC - 40GHz: 2.92mm M/F
DC - 34GHz: 3.5mm M/F
Triaxial to BNC Adapter
PN: A-CAC-XX-17118
M. Software Package
Choose Software Package
Wafer Map Software
The wafer map module automatically generates a mathematical equivalent of a wafer based on the wafer's size and die size. The wafer map enables the use to add and remove die to mimic the actual wafer. The user can bin the die based on pass/fail criterion and save the wafer map. The wafer map module is equipped with the unique ability to rotate the wafer, enabling back side and front side inspection or probing. Results are automatically
transferred to the front side wafer map and bad die are
automatically transferred as marked. Wafer map files can be exported to Excel or HTML for viewing and reporting.
SemiProbe Pilot Core Software V 1.0 is required
Wafer map module includes free upgrades for 1 year."
Wafer Cal Software
Short-Open-Load-Thru (SOLT) calibrations
- Perform S-Parameter calibrations
- Controls Agilent and Anritsu VNA's
- Other instruments can be added by the customer
- Customer might need to provide VNA to SemiProbe for complete testing
Available for Manual, Semiautomatic and Fully Automatic Probing Systems
Auto-Align Software
This eliminates stepping errors created as a result of poor manual alignment/operator error.
Included)